EBW 700

The EBW 700 is a Leybold Vacuum Systems' 60 kV machine in excellent condition that was built in 1992 and was still in use in April 2006. This system needs no modification to start production and has the unique capability of both horizontal and vertical column mounting positions. It also has a tubular extension capability. A standard description of the system is as follows:

• CHAMBER SIZE: 43.3" Long x 29.5" Wide X 35.4" High.
  
  
• CHAMBER MATERIAL: Steel with polished interior.
  
  
• CHAMBER ACCESS: Single, full-access, manually operated sliding door at left end of work chamber.
  
  
• VIEWING WINDOW: Single lead glass window located at the operator station.
  
  
• CHAMBER VACUUM SYSTEM: High Vacuum Diffusion Pump System. Auto Vacuum Sequencing.
  
  
• COLUMN VACUUM SYSTEM: Column independently pumped to
  5 X 10-3 Pa (5 X 10-5 mbar) minimum using turbomolecular pumping system. Auto Vacuum Sequencing. Isolation valve to maintain column vacuum during chamber venting.
  
  
• CHAMBER LIGHT: 150 watt floodlight.
  
  
• MACHINE CONTROL: Allen-Bradley Series 8200 CNC for controlling machine sequencing, X, Y and rotary axes motions, plus accelerating voltage, beam current, focus current, filament current and all deflection parameters. Manual control of parameters also included. Includes punched tape reader.
  
  
• TABLE CONTROL: Jog pushbuttons, joystick, handwheels and CNC.
  
  
• PENDANT STATION: Contains table jog controls.
  
  
• PARAMETER DISPLAY: Analog meters for vacuum status and digital displays for High Voltage, Beam Current, Focus Current and Filament Current.
  
  
• POWER SUPPLY: 7.5 kW output (60 kV at 125 mA maximum). Solid State SCR Controller for controlling high voltage.
  
  
• BEAM CURRENT CONTROL: Solid State Beam Current Regulator (Closed Loop).
  
  
• BEAM DEFLECTION: Manual X and Y D.C. Offset plus a Digital Deflection Generator. Amplitude, frequency, pattern (16 available) and pattern rotation are controlled by the CNC or manually.
  
  
• OPTICAL VIEWING SYSTEM: Cranked with monocular eyepiece.
  
  
• X-Y WORK TABLE: Variable Speed D.C. servo motor driven ball screw actuator for each axis.
  Table Size:
  Length: 21.7"
  Width: 14.0"
  Height Above Table: 26.4"
  Travel:
  X-Axis: 19.7"
  Y-Axis: 10.2"
  Speed: 118" IPM
  Load Capacity: 440 lbs
  
  
• TABLE RUNOUT SYSTEM: Powered by X-axis drive.
  
  
• FACILITIES REQUIREMENTS:
  Electrical: 460 V + 10%, 3 Phase, 60 Hertz, 50 amp (40 KVA). A 100-amp circuit breaker is used on the incoming power feed. (for reference only).
  Compressed Air: 3 CFM at 75 to 100 PSIG (Intermittent).
  Cooling Water: 1 GPM at 40 to 90 PSIG and 60 to 85o F